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Compositional tailoring of indium-free GZO layers via plasma-enhanced atomic layer deposition for highly stable IGZO/GZO TFTGo to Linkopen access

Oh, Hye-Jin; Kim, Yoon-Seo; Jeong, Hyun-Jun; Lee, Sunhee; Park, Joon Seok; Park, Jin-Seong

ArticleIssue Date2024CitationJOURNAL OF INFORMATION DISPLAY, v.25, no.3, pp 295 - 303PublisherTAYLOR & FRANCIS LTD
SCIESCOPUS
High-temperature interfacial stability of In2O3 FETs with SiO2 versus Al2O3 insulators enabling 3 nm channel scalingGo to Link

Oh, Hye-Jin; Lee, Jun-Yeoub; Beom, Jun Young; Sun, Ji Eun; Lee, Chi-Hoon; Park, Chang-Kyun; Kim, Duho; Kim, Minhyuk; Lee, Junseok; Cho, Seunghyun, et al.

ArticleIssue Date2026CitationApplied Surface Science, v.730, pp 1 - 6PublisherElsevier B.V.
SCIESCOPUS
High-Temperature-Stable Polycrystalline ALD-InGaO Channels Enabled by Buffer-Layer EngineeringGo to Link

Kim, Dong-Gyu; Oh, Hye-Jin; Cho, Tae Woong; Kwag, Jae-Hyeok; Hur, Jaeseok; Choi, Sunghyun; Park, Kwangmin; Park, Jin-Seong

ArticleIssue Date2026CitationACS APPLIED ELECTRONIC MATERIALS, v.8, no.7, pp 3175 - 3186PublisherAMER CHEMICAL SOC
SCIESCOPUS
Hydrogen-State-Engineered Oxide Semiconductor Channels Enabling Reliable 2T0C DRAM OperationGo to Linkopen access

Lee, Jun-Yeoub; Hwang, Taewon; Choi, Su-Hwan; Oh, Hye-Jin; Park, Chang-Kyun; Park, Jin-Seong

ArticleIssue Date2026CitationADVANCED ELECTRONIC MATERIALS, v.12, no.11, pp 1 - 9PublisherWILEY
SCIESCOPUS
Impact of atomic layer deposition supercycle design on the reliability of heterogenous IGZO channel TFTsGo to Link

Oh, Hye-Jin; Kim, Hye-Mi; Yoo, Hyeong Suk; Kim, Ji Wan; Baek, Il Jin; Park, Jin-Seong

ArticleIssue Date2025CitationCeramics International, v.51, no.2, pp 1793 - 1800PublisherElsevier
SCIESCOPUS
Reliability Engineering of High-Mobility IGZO Transistors via Gate Insulator Heterostructures Grown by Atomic Layer DepositionGo to Linkopen access

김윤서; Hwang, Taewon; Oh, Hye-Jin; Park, Joon Seok; 박진성

ArticleIssue Date2024CitationAdvanced Materials Interfaces, v.11, no.15, pp 1 - 8PublisherJohn Wiley and Sons Ltd
SCOPUS
Synthesis of Superior-Performance InGaZnO Based on Ideal Reaction of Plasma Enhanced Atomic Layer DepositionGo to Link

Kim, Yoon-Seo; Oh, Hye-Jin; Kim, Junghwan; Lim, Jun Hyung; Park, Jin-Seong

ArticleIssue Date2023CitationDigest of Technical Papers - SID International Symposium, v.54, no.1, pp 1806 - 1809
SCIESCOPUS
Tailoring the number of lines for IGO-channel 2T0C DRAM comparable to conventional 2-line operation 1T1C structure for highly scaled cell volumeGo to Linkopen access

Kwag, Jae-Hyeok; Choi, Su-Hwan; Kim, Daejung; Lee, Jun-Yeoub; Hwang, Taewon; Oh, Hye-Jin; Park, Chang-Kyun; Park, Jin-Seong

ArticleIssue Date2025CitationInternational Journal of Extreme Manufacturing, v.7, no.5, pp 1 - 11PublisherIOP Publishing
SCIESCOPUS
Thermally Stable Crystalline InGaO Channels via Optimized ALD for Advanced DRAM ApplicationsGo to Link

Kim, Dong-Gyu; Oh, Hye-Jin; Yang, Hae Lin; Kho, Jihyun; Kim, Yurim; Kuh, Bong Jin; Park, Jin-Seong

ArticleIssue Date2025CitationACS Applied Electronic Materials, v.7, no.11, pp 5304 - 5315PublisherAMER CHEMICAL SOC
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