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Browsing by Kim, In-SeonAuthor

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SCOPUS

193nm inspection of extreme ultraviolet mask absorber defect Go to Link

Kim, Guk-Jin; Kim, In-Seon; Yeung, Michael; Lim, Chang-Moon; Oh, Hye-Keun

ArticleIssue Date2014CitationProceedings of SPIE - The International Society for Optical Engineering, v.9048, pp 1 - 7PublisherSPIE

SCIESCOPUS

Anisotropic shadow effects with various pattern directions in an anamorphic high numerical aperture system Go to Link

Kim, In-Seon; Kim, Guk-Jin; Yeung, Michael; Barouch, Eytan; Kim, Seong-Wook; Oh, Hye-Keun

ArticleIssue Date2016CitationJournal of Micro/ Nanolithography, MEMS, and MOEMS, v.15, no.3, pp 1 - 6PublisherSPIE - International Society for Optical Engineering

SCIESCOPUS

Compound-Specific Isotope Analysis Provides Direct Evidence for Identifying the Source of Residual Pesticides Diazinon and Procymidone in the Soil-Plant System Go to Link

Yun, Hee Young; Kim, In-Seon; Shin, Kyung-Hoon

ArticleIssue Date2024CitationJournal of Agricultural and Food Chemistry, v.72, no.21, pp 11980 - 11989PublisherAmerican Chemical Society

SCISCIESCOPUS

Critical dimension variation caused by wrinkle in extreme ultra-violet pellicle for 3-nm node Go to Link

Kim, Guk-Jin; Kim, In-Seon; Lee, Sung-Gyu; Yeung, Michael; Kim, Min-Su; Park, Jin-Goo; Oh, Hye-Keun

ArticleIssue Date2017CitationJapanese Journal of Applied Physics, v.56, no.10, pp 1 - 7PublisherIOP Publishing Ltd

SCIESCOPUS

Effect of defects on extreme ultraviolet pellicle Go to Link

Kim, In-Seon; Kim, Guk-Jin; Yeung, Michael; Barouch, Eytan; Kim, Mun-Ja; Kim, Seong-Sue; Kim, Ji-Won; Oh, Hye-Keun

ArticleIssue Date2014CitationProceedings of SPIE - The International Society for Optical Engineering, v.9048, pp 1 - 9PublisherSPIE

SCIESCOPUS

Etched multilayer mask is better than conventional absorber mask Go to Link

Kim, Guk-Jin; Oh, Hye-Keun; Kim, In-Seon; Yeung, Michael; Barouch, Eytan

ArticleIssue Date2014CitationProceedings of SPIE - The International Society for Optical Engineering, v.9256, pp 1 - 14PublisherSPIE

SCIESCOPUS

Heat behavior of extreme-ultraviolet pellicle including mesh support Go to Link

Kim, In-Seon; Kim, Eun-Jin; Kim, Ji-Won; Oh, Hye-Keun

ArticleIssue Date2013CitationProceedings of SPIE - The International Society for Optical Engineering, v.8679, pp 1 - 7PublisherSPIE

SCIESCOPUS

Impact of a deformed extreme ultraviolet pellicle in terms of the critical dimension uniformity Go to Link

Kim, In-Seon; Yeung, Michael; Barouch, Eytan; Oh, Hye-Keun

ArticleIssue Date2016CitationJournal of Micro/ Nanolithography, MEMS, and MOEMS, v.15, no.2, pp 1 - 9PublisherSPIE - International Society for Optical Engineering

SCIESCOPUS

Impact of deformed extreme-ultraviolet pellicle in terms of CD uniformity Go to Link

Kim, In-Seon; Yeung, Michael; Barouch, Eytan; Oh, Hye-Keun

ArticleIssue Date2015CitationProceedings of SPIE - The International Society for Optical Engineering, v. 9658, pp 1 - 14PublisherSPIE

SCIESCOPUS

Impact of transmission non-uniformity of a wrinkled EUV pellicle for N5 patterning under various illuminations Go to Link

Kim, In-Seon; Kim, Guk-Jin; Yeung, Michael; Barouch, Eytan; Oh, Hye-Keun

ArticleIssue Date2017CitationMICROELECTRONIC ENGINEERING, v.177, pp.35 - 40PublisherELSEVIER SCIENCE BV

SCIESCOPUS

Influence of a wrinkle in terms of critical dimension variation caused by transmission nonuniformity and a particle defect on extreme ultraviolet pellicle Go to Link

Kim, Guk-Jin; Kim, In-Seon; Lee, Sung-Gyu; Yeung, Michael; Kim, Min-Su; Park, Jin-Goo; Oh, Hye-Keun

ArticleIssue Date2017CitationJournal of Micro/ Nanolithography, MEMS, and MOEMS, v.16, no.4PublisherSPIE - International Society for Optical Engineering

SCOPUS

Is extreme-ultraviolet pellicle possible? - In terms of heat absorption Go to Link

Kim, In-Seon; Lee, Hyung-Cheol; Kim, Eun-Jin; Kim, Ji-Won; Oh, Hye-Keun

ArticleIssue Date2012CitationProceedings of SPIE - The International Society for Optical Engineering, v.8322, pp 1 - 10PublisherSPIE

SCIESCOPUS

Mask three-dimensional effects of etched multilayer mask for 16-nm half-pitch in extreme ultraviolet lithography Go to Link

Kim, Guk-Jin; Kim, In-Seon; Yeung, Michael; Oh, Hye-Keun

ArticleIssue Date2016CitationJournal of Micro/ Nanolithography, MEMS, and MOEMS, v.15, no.2, pp 1 - 5PublisherSPIE - International Society for Optical Engineering

SCIESCOPUS

Multistack structure for an extreme-ultraviolet pellicle with out-of-band radiation reduction Go to Link

Lee, Sung-Gyu; Kim, Guk-Jin; Kim, In-Seon; Ahn, Jin-Ho; Park, Jin-Goo; Oh, Hye-Keun

ArticleIssue Date2015CitationJournal of Micro/ Nanolithography, MEMS, and MOEMS, v.14, no.4, pp 1 - 7PublisherSPIE - International Society for Optical Engineering

SCIESCOPUS

Optical proximity correction for extreme ultra-violet mask with pellicle Go to Link

Mo, Soo-Yeon; Kim, In-Seon; Oh, Hye-Keun

ArticleIssue Date2015CitationProceedings of SPIE - The International Society for Optical Engineering, v.9635, pp 1 - 6PublisherSPIE

SCIESCOPUS

Patterning dependence on the mask defect for extreme ultraviolet lithography Go to Link

Ji, Hye-Rim; Kim, In-Seon; Kim, Guk-Jin; Park, Jin-Goo; Kim, Min-Su; Yeung, Micheal; Barouch, Eytan; Oh, Hye-Keun

ArticleIssue Date2015CitationProceedings of SPIE - The International Society for Optical Engineering, v.9658, pp 1 - 9PublisherSPIE

SCIESCOPUS

Stable Isotope Analysis of Residual Pesticides via High Performance Liquid Chromatography and Elemental Analyzer-Isotope Ratio Mass Spectrometry Go to Link open access

Yun, Hee Young; Won, Eun-Ji; Choi, Jisoo; Cho, Yusang; Lim, Da-Jung; Kim, In-Seon; Shin, Kyung-Hoon

ArticleIssue Date2022CitationMolecules, v.27, no.23, pp 1 - 13PublisherMultidisciplinary Digital Publishing Institute (MDPI)

SCISCIESCOPUS

Study of Temperature Behaviors for a Pellicle in Extreme-Ultraviolet Lithography: Mesh Structure Go to Link

Kim, In-Seon; Kim, Ji-Won; Oh, Hye-Keun

ArticleIssue Date2013CitationJapanese Journal of Applied Physics, v.52, no.12, pp 1 - 5PublisherIOP Publishing Ltd

SCIESCOPUS

Throughput compensation through optical proximity correction for realization of an extreme ultraviolet pellicle Go to Link

Ko, Ki-Ho; Mo, Soo-Yeon; Kim, In-Seon; Oh, Hye-Keun

ArticleIssue Date2016CitationJournal of Micro/ Nanolithography, MEMS, and MOEMS, v.15, no.2, pp 1 - 8PublisherSPIE - International Society for Optical Engineering

SCIESCOPUS

Throughput compensation through optical proximity correction for realization of an extreme-ultraviolet pellicle Go to Link

Ko, Ki-Ho; Mo, Soo-Yeon; Kim, In-Seon; Oh, Hye-Keun

ArticleIssue Date2016CitationProceedings of SPIE - The International Society for Optical Engineering, v.9776, pp 1 - 9PublisherSPIE

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Browsing by Kim, In-SeonAuthor

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