Chang, Chienliu; Firouzi, Kamyar; Park, Kwan Kyu; Sarioglu, Ali Fatih; Nikoozadeh, Amin; Yoon, Hyo-Seon; Vaithilingam, Srikant; Carver, Thomas; Khuri-Yakub, Butrus T.
ArticleIssue Date2014CitationJournal of Micromechanics and Microengineering, v.24, no.8, pp 1 - 14PublisherInstitute of Physics Publishing