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Results 41-50 of 125 (Search time: 0.005 seconds).

SCIESCOPUS
GaInAsP/InP distributed reflector lasers consisting of deeply etched vertical gratingsGo to Link

Wiedmann, Jörg; Kim, Hyo-Chang; Ebihara, Koji; Chen, Bo; Ohta, Masataka; Tamura, Shigeo; Shim, Jong In; Arai, Shigehisa

ArticleIssue Date2001CitationJapanese Journal of Applied Physics, v.40, no.12, pp.6845 - 6851PublisherIOP Publishing Ltd
SCIESCOPUS
Particle adhesion and removal on EUV mask layers during wet cleaningGo to Link

Lee, Sang ho; Hong, Yi-Koan; Song, Jae-Hoon; Park, Jin-Goo; Busnaina, Ahmed A; Zhang, Guijing; Eschbach, Florence; Ramamoorthy, Arun

ArticleIssue Date2005CitationJapanese Journal of Applied Physics, v.44, no.7B, pp.5479 - 5483PublisherIOP Publishing Ltd
SCIESCOPUS
Photo-electrochemical gate recess etching for the fabrication of AlGaN/GaN heterostructure field effect transistorGo to Link

Lee, Jae seung; Kim, Jong wook; Jung, Doo chan; Kim, Chang seok; Lee, Won sang; Lee, Jae hak; Shin, Jin ho; Shin, Moo whan; Oh, Jae eung; Lee, Jung hee

ArticleIssue Date2001CitationJAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.40, no.3A, pp.L198 - L200PublisherINST PURE APPLIED PHYSICS
SCIESCOPUS
Physical and chemical characterization of reused oxide chemical mechanical planarization slurryGo to Link

Kim, Hyung joon; Eom, Dae hong; Park, Jin-Goo

ArticleIssue Date2001CitationJapanese Journal of Applied Physics, v.40, no.3A, pp.1236 - 1239PublisherIOP Publishing Ltd
SCIESCOPUS
Laser shock removal of nanoparticles from Si capping layer of extreme ultraviolet lithography masksGo to Link

Lee, Sang ho; Kang, Young-Jae; Park, Jin-Goo; Busnaina, Ahmed A; Lee, Jong myung; Kim, Tae hoon; Zhang, Guojing; Eschbach, Florence; Ramamoorthy, Arun

ArticleIssue Date2005CitationJapanese Journal of Applied Physics, v.44, no.7B, pp.5560 - 5564PublisherIOP Publishing Ltd
SCIESCOPUS
Effect of chemicals and slurry particles on chemical mechamical polishing of polyimideGo to Link

Kim, Hyoung gyun; An, Yoo min; Moon, Doo kyung; Park, Jin-Goo

ArticleIssue Date2000CitationJapanese Journal of Applied Physics, v.39, no.3A, pp.1085 - 1090PublisherIOP Publishing Ltd
SCIESCOPUS
Barrier metal properties of amorphous tantalum nitride thin films between platinum and silicon deposited using remote plasma metal organic chemical vapor methodGo to Link

Han, Chang hee; Cho, Kwang nam; Oh, Jae eung; Paek, Su hyoun; Park, Chang soo; Lee, Sang in; Lee, Moon yong; Lee, Jong gil

ArticleIssue Date1998CitationJAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.37, no.5R, pp.2646 - 2651PublisherJAPAN J APPLIED PHYSICS
SCIESCOPUS
The vapor phase deposition of fluorocarbon films for the prevention of in-use stiction in micromirrorsGo to Link

Park, Jin-Goo; Kwon, Myong Jong; Lee, Sang Ho; Lee, Kang Kuk; Kim, Yong Kweon; Shin, Hyung Jae

ArticleIssue Date1998CitationJapanese Journal of Applied Physics, v.37, no.12 B, pp.7058 - 7063PublisherIOP Publishing Ltd
SCIESCOPUS
Effect of chemicals and slurry particles on chemical mechanical polishing of polyimideGo to Link

Kim, Hyoung-Gyun; Ahn, Yoomin; Moon, Doo-Kyung; Park, Jin Goo

ArticleIssue Date2000CitationJapanese Journal of Applied Physics, v.39, no.3A, pp.1085 - 1090PublisherIOP Publishing Ltd
SCIESCOPUS
A long-wavelength infrared photodetector with self-organized InAs quantum dots embedded on HEMT-like structureGo to Link

Cho, Tae hee; Kim, Jong wook; Oh, Jae Eung; Choe, Jeong woo; Hong, songcheol

ArticleIssue Date1999CitationJAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.38, no.4B, pp.2442 - 2444PublisherJAPAN J APPLIED PHYSICS
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