Yang, Jung Yup; Yoon, Kap Soo; Choi, Won Joon; Do, Young Ho; Kim, Ju Hyung; Kim, Chae Ok; Hong, Jin Pyo
ArticleIssue Date2006CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.24, no.6, pp 2636 - 2639PublisherAmerican Institute of Physics