ScholarWorks@Hanyang University

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Journal Title

  • Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

ISSN

  • E 2166-2746 | P 1071-1023

Publisher

  • American Institute of Physics

Listed on(Coverage)

JCR 1997-2019
SCI 2010-2019
SCIE 2010-2021
CC 2016-2021
SCOPUS 2017-2020

Active

  • Inactive

Country

  • USA

Article List

21 - 35 out of 35 results.

SCIESCOPUS
Improvement of imaging properties by optimizing the capping structure in extreme ultraviolet lithographyGo to Link

Jeong, Chang Young; Lee, Sangsul; Shin, Hyun-Duck; Kim, Tae Geun; Ahn, Jinho

ArticleIssue Date2009CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.27, no.6, pp 2922 - 2926PublisherAmerican Institute of Physics
SCIESCOPUS
Double layer-coated carbon nanotubes: Field emission and secondary-electron emission properties under presence of intense electric fieldGo to Link

Lee, Jungwoo; Park, Jaehong; Sim, Kijo; Yi, Whikun

ArticleIssue Date2009CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.27, no.2, pp 626 - 630PublisherAmerican Institute of Physics
SCIESCOPUS
Improved field emission properties from polycrystalline indium oxide-coated single-walled carbon nanotubesGo to Link

Lee, Jungwoo; Lee, Wonjoo; Sim, Kijo; Han, Sung-Hwan; Yi, Whikun

ArticleIssue Date2008CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.26, no.6, pp 1892 - 1895PublisherAmerican Institute of Physics
SCIESCOPUS
Growth of nitrogen doped ZnO films through a nitrogen diffusion process from WN films formed by a cosputtering techniqueGo to Link

Lee, Jonghyun; Ha, Jaehwan; Hong, Jinpyo; Cha, Seungnam; Paik, Ungyu

ArticleIssue Date2008CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.26, no.5, pp 1696 - 1699PublisherAmerican Institute of Physics
SCIESCOPUS
Field emission properties of single-walled carbon nanotube with amphoteric doping by encapsulation of TTF and TCNQGo to Link

Lee, Jungwoo; Lee, Wonjoo; Sim, Kijo; Han, Sung-hwan; Yi, Whikun

ArticleIssue Date2008CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.26, no.2, pp 847 - 850PublisherAmerican Institute of Physics
SCIESCOPUS
Analysis of temperature-dependent barrier heights in erbium-silicided Schottky diodesGo to Link

Jun, Myungsim; Jang, Moongyu; Kim, Yarkeon; Choi, Cheljong; Kim, Taeyoub; Oh, Soonyoung; Lee, Seongjae

ArticleIssue Date2008CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.26, no.1, pp 137 - 140PublisherAmerican Institute of Physics
SCIESCOPUS
Atomic layer deposited HfO2/HfSixOyNz stacked gate dielectrics for metal-oxide-semiconductor structuresGo to Link

Kim, Seokhoon; Woo, Sanghyun; Kim, Hyungchul; Jeong, Wooho; Park, Taeyong; Kim, Honggyu; Kim, Sung Bae; Jeon, Hyeongtag

ArticleIssue Date2007CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.25, no.6, pp 1922 - 1927PublisherAmerican Institute of Physics
SCIESCOPUS
First-principles calculation of electronic structure and magnetic properties of copper adsorbed polar-ZnO surfaceGo to Link

Kim, Yoon-Suk; Chung, Yong-Chae

ArticleIssue Date2007CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.25, no.6, pp 2616 - 2618PublisherAmerican Institute of Physics
SCIESCOPUS
Effect of double layer coating on carbon nanotubes for field emission and secondary electron emission measurementGo to Link

Lee, Jungwoo; Park, Jaehong; Kim, Jeongyoul; Yi, Whikun

ArticleIssue Date2007CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.25, no.2, pp 570 - 574PublisherAmerican Institute of Physics
SCIESCOPUS
Effect of UV irradiation during synthesis of polypyrrole by a one-step deposition/polymerization processGo to Link

Chang, Sunyoung; Park, Jaehong; Jang, Jiyoung; Lee, Jungwoo; Lee, Jaeseung; Yi, Whikun

ArticleIssue Date2007CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.25, no.2, pp 670 - 673PublisherAmerican Institute of Physics
SCIESCOPUS
Efficient fabrication and characterization of cobalt nanoparticles embeddedin metal/oxide/semiconductor structures for the application of nonvolatile memoryGo to Link

Yang, Jung Yup; Yoon, Kap Soo; Choi, Won Joon; Do, Young Ho; Kim, Ju Hyung; Kim, Chae Ok; Hong, Jin Pyo

ArticleIssue Date2006CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.24, no.6, pp 2636 - 2639PublisherAmerican Institute of Physics
SCIESCOPUS
Nanoscale floating-gate characteristics of colloidal Au nanoparticles electrostatically assembled on Si nanowiresGo to Link

Jeon, Hongseok; Cho, Chan-Woo; Lim, Chun Hsiung; Park, Bonghyun; Ju, Heongkyu; Kim, Sangsig; Lee, Seung-Beck

ArticleIssue Date2006CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.24, no.6, pp 3192 - 3195PublisherAmerican Institute of Physics
SCIESCOPUS
Novel absorber stack for minimizing shadow effect in extreme ultraviolet maskGo to Link

Kim, Tae Geun; Kim, Byung Hun; Kang, In-Yong; Chung, Yong-Chae; Ahn, Jinho; Lee, Seung Yoon; Park, In-Sung; Kim, Chung Yong; Lee, Nae-Eung

ArticleIssue Date2006CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.24, no.6, pp 2820 - 2823PublisherAmerican Institute of Physics
SCIESCOPUS
Postannealing effect on pseudobilayer HfO2/HfSixOy/Si gate oxides formed by an inductively coupled sputtering processGo to Link

Choi, Won Joon; Lee, Eun Joung; Lee, Jong Hyun; Yang, Jung Yup; Do, Young Ho; Hong, Jin Pyo

ArticleIssue Date2006CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.24, no.4, pp 1818 - 1821PublisherAmerican Institute of Physics
SCIESCOPUS
Characteristics of HfO2 thin films deposited by plasma-enhanced atomic layer deposition, using O-2 plasma and N2O plasmaGo to Link

Kim, Seokhoon; Kim, Jinwoo; Choi, Jihoon; Kang, Hyunseok; Jeon, Hyeongtag; Bae, Choelhwyi

ArticleIssue Date2006CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.24, no.3, pp 1088 - 1093PublisherAmerican Institute of Physics
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